Research Activities

Process and Equipment Development

| 2005 | 2004 | 2003 |

2005

• High Pressure Homogenizing Technology
• Nanoparticle Grinding and Dispersing Technology
• Nanoimprint Technology
• Overlay Metrology for Next Generation Lithography
• Advanced NanoScopy Inspection Technology
• Scattering-type Scanning Near-field Optical Microscopy (s-SNOM)
• Nanostructures Simulations

2004

• Nano-structure fabrication and Equipment (250 KB)
• Nanoparticles Processing Equipment (241 KB)
• Optical Non-destructive Technique for Measuring Young's Modulus of MEMS (216 KB)
• Nanoscale 2D Laser Encoder (216 KB)
• Microscope Objective Type Atomic Force Microscope (242 KB)
• Nanostructural Simulations (242 KB)
• Platform Technology for Organic Nanopatterning (387 KB)

2003

• Space-Confined Polymerization (117 KB)
• DC-Plasma Synthesis of Nanomaterials (308 KB)
• Surface Modification of Nanowires (308 KB)
• Nanostructure Simulation (115 KB)
• Nanotemplate-based Fabrication Technology (115 KB)
• Multi-element High-entropy Alloys (102 KB)
• Nano-fabrication Processes and Equipment (105 KB)
• MPECVD Growth of Carbon Nanotubes & Applications (106 KB)
• Microscope Objective Type Atomic Force Microscope (106 KB)