Doing Business with NTRC
General
ITRI has always actively sought cooperation partners. There are
a large variety of possible business relations including contractual
research and/or service, cooperative research, licensing, joint
ventures, etc. (Please visit http://www.itri.org.tw/eng/business/approaches.jsp?tree_idx=0200
for details.)
NTRC, being on the leading edge of technology and as the flag
bearer of the National Nanotechnology Program, makes a special
effort reaching out. In addition to what is said above, NTRC operates
an advanced common facilities center, accessible to all potential
partners, domestic or foreign.
Sharing of Facilities
NTRC strives to make ITRI's facilities available to all. The key facilities are located in a building with total
floor space over 11,000 square meters, including a cleanroom (partitioned
into sections with class 1, 100 or 1000 designations). The table
of advanced test/analysis/processing equipment below, though not
exhaustive, shows the range and degree of sophistication.
Nanotechnology analysis/rearmament/processing equipment
| beginning year\item |
2003 |
2004 |
2005 |
2006 |
Microstructure
/Chemical analysis |
- FE-TEM
- FE-AES
- µ -FTIR
- NMR500MHz
- µ -ESCA
- ICP-MS
- FE-SEM
|
|
|
|
| Basis characteristics |
|
|
|
|
| Application characteristics |
- AFM/STM
- SNOM
- Nano-Indenter
|
- PL/µ-PL
- Wafer shape measurement
- Non-contact 3D measurement
|
|
|
| Nano fabrication |
|
- Wafer bonding system
- E-Beam recorder
|
|
|
| Nano lithography |
- E-beam writer
- EB/CD-SEM
- Track
|
|
|
|
| Nano thi- film |
|
- Atomic layer depositor
- Sputtering equipment
- Etching equipment
|
|
|
Other related
equipment |
- Sample wafer prep room
- Waste treatment system
|
- Plant facilities
- Specialty gases system
|
|
|
Furthermore, there are ten ITRI facilitiy centers that are closely
related to the naotechnology program. Research proposals involving
facilities can be submitted to NTRC. A user association, currently
with 52 institutional paying members, has been formed for timely
exchange of relevant information. A website (with mixed Chinese
and English contents as illustrated below) is maintained for association
members. The on-line database will also provide information about
equipment not on the NTRC proper, but available through prior
agreement with incumbent laboratories.
Contacts
General inquiry:
Ms. Hui-Ju, Amanda, Cheng
Room 203, Bldg. 67, 195, Sec. 4, Chung-Hsing Rd.
Chutung, Hsinchu, 310, Taiwan, R.O.C.
tel:886-3-591-9193
fax:886-3-591-0086
e-mail: hjc@itri.org.tw
Common facilities:
Mr. Hua-Chung Tzou
Room 209, Bldg. 67, 195, Sec. 4, Chung-Hsing Rd.
Chutung, Hsinchu, 310, Taiwan, R.O.C.
Tel: +886-3-591-2968
Fax: +886-3-591-0086
E-mail: hctzou@itri.org.tw
